Micro- nano- mechanical system

Material and device for energy storage system

Noval sensor technology

Main awards:

2005, The first award for the progress of science and technology by Shanghai government.( Line 9)(上海市科技进步一等奖（排名第9）)

2006, The first award for the progress of science and technology by the Peoples’ Republic of China,(Line 11) (国家科技进步一等奖（排名第11）)

List of Publications

Journals

1. Lianwei Wang, M. Östling, Kai Yang, Linhong Qin, Chenglu Lin, Xiangdong Chen, Shichang Zou, Yuxiang Zheng and Youhua Qian, "Optical transitions in b-FeSi2 films", Phys. Rev. B 54 (16), 11126R(1996)

2. Lianwei Wang, Linhong Qin, Yuxiang Zheng, Wenzhong Shen, Xiangdong Chen, Xian Lin, Chenglu Lin and Shichang Zou, "Optical transition properties of b-FeSi2 film"Appl. Phys. Lett. 65(24), 3105(1994)

3. Lianwei Wang, Chenglu Lin, Qinwo Shen, Xian Lin, Rushan Ni and Shichang Zou "Reactive deposition epitaxial growth of b-FeSi2 film on Si(111): in situ observation by reflective high energy electron diffraction",Appl. Phys. Lett. 66(25),3453(1995)

4. X.D. Chen, Lianwei Wang, Q.W. Shen, R.S. Ni and Chenglu Lin, "Characterization of FeSixprepared by codeposition on b-FeSi2 template". Appl. Phys. Lett. 68(20), 2858(1996)

5. Lianwei Wang, Chenglu Lin, X.D. Chen, S.C. Zou, L.H. Qin, H.T. Shi, W.Z. Shen and M. Östling, "A clarification of the optical transition of b-FeSi2 film", Solid State Communications97, 385(1996)

6. W.Z. Shen, S.C. Shen, W.G. Tang and Lianwei Wang, "Optical and photoelectric properties of *-FeSi2film", J. Appl. Phys. 78(7), 4793(1995)

7. H.P. Xin, C.L. Lin, W-Ping Xu, L.W. Wang, S.C. Zou, X.L. Wu, X.H. Shi and H.Zhu, "Structural properties of carbon nitride films prepared by high dose nitrogen implantation into carbon thin film", J. Appl. Phys. 79(5), (1996)

8. Rongchuan-Liu; Huaixian-Lu; Lianwei-Wang; Yuanfu –Hsia, Mossbauer study and magnetic characterization of the oxidized surface layer of fine iron particles, Nuclear-Instruments-&-Methods-in-Physics-Research,-Section-B-(Beam-Interactions-with-Materials-and-Atoms). vol.B76, no.1-4; April 1993; p.140-2

9. C.L. Lin, L.W. Wang, X.D. Chen, L.M. Wang and L.F. Chen, "Structural characterization of codeposition growth FeSi₂ films", Jpn. J. Appl. Phys.37, 622(1998)

10. D. Mangelinck, L.Wang, J. Grahn,P.Gas, C. Lin and M. Ostling, "Influence of the addition of Co and Ni on the formation of epitaxial semiconducting b-FeSi2, comparison of different methods", J. Appl. Phys. 83,4193(1998)

11. Rushan Ni, Lianwei Wang, Qinwo Shen and Chenglu Lin, "Structural characterization ofb-FeSi2 films on Si(100) prepared by reactive deposition solid phase epitaxy",J. Trace and Microprobe Techniques, 15(4) , 541(1997)

12. W.Z. Shen, W.G. Tang, ,Z.Y. Li, S.C. Shen and Lianwei Wang, "Study of Characteristics of photocurrent spectra of b-FeSi2 thin film", Phys. Stat. Solidi (b)187, 511(1995)

13. Lianwei Wang, Qinwo Shen, Xiangdong Chen, Xian Lin, Chenglu Lin, and Shichang Zou, "Synthesis of b-FeSi2 film by reactive deposition solid phase epitaxy",Chinese Phys. Lett. 12(5), 301(1995)

14. Lianwei Wang, Chenglu Lin, Qinwo Shen, Rushan Ni and Shichang Zou, "Reactive deposition epitaxial growth of b-FeSi2 film on Si(001): in situ observation by reflective high energy electron diffraction", Chinese Phys. Lett.12(10), 613(1995)

15. W.Z. Shen, Lianwei Wang, W.G. Tang, Z.Y. Li and S.C. Shen, "Photocurrent studies of b-FeSi2 thin films", Chinese Phys. Lett. 12(1), 34(1995)

16. Xiangdong Chen, Lianwei Wang, Xian Lin, Chenglu Lin and Shichang Zou, "The Influence of Annealing on the Formation ofb-FeSi2 ",(in Chinese)Chinese Journal of Semiconductor 16(10), 794 (1995)

17. Lianwei Wang, Qinwo Shen, Xian Lin, Chenglu Lin, Shichang Zou and Zhicheng Zhuang, " b-FeSi2/ SIMOX, A novel structure optoelectronic material",(in Chinese) Chinese Journal of Semiconductor 17, 201(1996)

18. Y.F. Chen, L.Sun, T. Yu, J.X. Chen, D.S. Ding and L.W. Wang, "Single Crystalline, single domain epitaxy of PbTiO3 thin films by metalorganic chemical vapor deposition" Appl. Phys. Lett. 67(23), 3503(1995)

19. L. Sun, Y.F. Chen, W.H. Ma, L.W. Wang, T. Yu, M.S. Zhang, and N.B. Ming, "Evidence of ferroelectricity weakening in the polycrystalline PbTiO3 thin film", Appl. Phys. Lett. 68(26), 3729(1996)

20. Pingxiong Yang, Lirong Zheng, Lianwei Wang and Chenglu Lin, "Influence of annealing on crystal structure and properties of SrBi2Ta2O9 thin film prepared by pulsed laser deposition", Chinese Physics Letters, 13(12),934 (1996)

21. Pingxiong Yang, Lirong Zheng, Lianwei Wang, Chenglu Lin, Ningsheng Zhou and Huaixian Lu, "Fabrication of ferroelectric SBT thin film by pulse excimer laser deposition", (in Chinese) Chinese Journal of Laser, 24(7), 397 (1997)

22. L.R. Zheng, P.X. Yang, L.W. Wang, C.L. Lin and S.C.Zou, " A study of oxygen ion implantation into ferroelectric Pb(Zr,Ti)O₃ films", Nucl. Instr.Method in Phys.Res.B127, (1997)621

23. Miao Zhang, Lianwei Wang, Zuyao Zhou, Zixin Lin and Chenglu Lin, "Annealing properties of crystalline silicon implanted with high dose of proton", Phys. Stat. Sol. (a)165,361(1998)

24. Miao Zhang, Lianwei Wang, Jianxia Gao, Chenglu Lin, P.L.F. Hemment, K. Gutjahr and U. Gösele, "Gettering of Cu by He-induced cavity in SIMOX materials" Nucl. Instr. Method in Phys. Res. B, (134)3-4 (1998) pp. 360-364

25. M.Duan, C. Frojdh, G. Thungstromm, L.W.Wang, J.Linnros and C.S. Petersson, “Deposition of scintillating layers of bismuth germanate (BGO) films for X-ray detector application", IEEE Transactions on Nuclear Sciences 45(3) (1998)525

26. .JP Huang, LW Wang, QW Shen JX Gao RS Ni and CL Lin, "C-axis oriented AlN thin film on silicon prepared by ultrahigh vacuum evaporation of Al combined with post-nitridation", Chin. Phys. Lett. 15, (1998)732

27. M Zhang, JM Zeng, JP Huang LW Wang and CL Lin, Nanocavity on effective gettering method for SIMOX wafer”,Chin. Phys. Lett. 15(1998)516

28. JP Huang, LW Wang, QW Shen, CL Lin and Mikael Östling, "Structural and electrical characterisation of AlN thin film obtained by nitridation of Al/Si substrate", Journal of Electronic Materials 28,(1999)223

29. JP Huang, LW.Wang, QW.Shen, CL.Lin and M. Östling, "Preparation of AlN thin films by nitridation of Al-coated Si substrate", Thin Solid Films 340, (1999)137

30. JM Zeng, M. Zhang, LW Wang, and CL Lin, "Influence of lead titanate layer on orientation behavior and ferroelectric characteristics of sol-gel derived PZT thin films, Journal of Physics, Condensed matter 11, (1999)1139.

31. JM Zeng, SG Song, LW Wang, M.Zhang, LR Zheng and CL Lin, "Sol-gel preparation of Pb(Zr0.50Ti0.50)O3 ferroelectric thin films using zirconium oxynitrate as the zirconium source,"Journal of American Ceramic Society, 82(2), (1999)

32. JM Zeng, LW Wang, JX Gao, ZT Song, XR Zhu and CL Lin, "Structural and electrical characteristics of oriented Pb(Zr0.52Ti0.48)O3 ferroelectric thin films deposited on diamond substrate by a simple sol-gel process", Journal of Crystal Growth 197(1999)874

33. LW Wang, JP Huang, CL Lin, SC Zou, YX Zheng, XJ Wang, DM Huang, C.Zetterling and M.Östling, "A Study of Optical Characteristics of Damage in Oxygen-Implanted 6H-SiC", Journal of Materials Sciences Letters, 18, (1999)979-982

34. JP HuangLW Wang, J.Wen, YX Wang, CL Lin and M.Östling, Effect of Annealing on SiC thin film prepared by pulsed laser deposition”, Diamond and Related Materials 8, (1999)2099

35. ZT Song, CL Lin, JP Huang, LW Wang JM Zeng, JX Gao, HP Xu and M Okuyama, “Variation of the microstructure and morphology with oxygen pressure in Ba0.51Sr0.48La0.01Nb2O6 thin film prepared by pulsed laser deposition”,Materials Letters, 40,(1999)83

36. JX Gao, LR Zheng,ZT Song, LW Wang, LX Yang,DZ Zhu and Chenglu Lin, “Characteristics of Au/PbZr0.52Ti0.48O3/Yba2Cu3O7-d capacitors fabricated on LaAlO3 and Y2O3-stabilized ZrO2 substrate during irradiation”, Philosophical Magazine B, 79, (1999)829

37. LW Wang, JP Huang, XZ Duo, ZT Song, CL Lin, CM Zetterling and M Östling, “Invsetigation of damage behaviour and isolation effect of n-type 6H-SiC by implantation of oxygen”, J. of Phys. D, Appl. Phys., 33, (2000)1551

38. LW Wang, JP Huang, XZ Duo, ZT Song, CL Lin, CM Zetterling and M.Östling, “Structural and electrical characteristics of oxygen implanted 6H SiC”, Nuclear Instruments and Methods in Physics Research B 169, (2000)1.

39. Jianxia Gao, Lirong Zheng, Xiangrong Zhu, Lianwei Wang, Chenglu Lin and Dezhang Zhu, “Asymmetry of the hysteresis loops for the Au/PbTiO₃/YBa₂Cu₃O_7- capacitor”, Nuclear Instruments and Methods in Physics Research B 169, (2000)12

40. W.L. Liu, M.Zhang, C.L. Lin, Z.M. Zeng, LW Wang and P.K. Chu, “Intense blue-light emission from carbon-plasma-implanted porous silicon”, Appl. Phys. Lett. 78, (2001)37

41. X.Z. Duo, W.L. Liu, M.Zhang, L.W. Wang, C.L. Lin, M. Okuyama, M. Noda, W.Y. Cheung, P.K. Chu, P.G. Hu, S.X. Wang and L.M. Wang, “Comparison between the different implantation orders in H/sup +/ and He/sup +/ coimplantation”,J.Phys. D, Applied Physics, 34 (4), (2001)477

42. W. L. Liu, X. Z. Duo, L.W. Wang, M. Zhang, Q. W. Shen, C. L. Lin, and P. K. Chu, "SOI Structure Fabricated by Ultra Vacuum Electron Beam Evaporation of Si on Porous Si and Epitaxial Layer Transfer", Chinese Physics Letters, vol. 18(5), pp. 662 - 664 (2001).

43. Z.T. Song, C.L. Lin, L.W. Wang, S.X. Wang, L.M. Wang, J.X. Gao and X.R. Fu, “Microstructural and electrical properties in textured lead calcium lanthanum titanate thin films deposited on a Pt/Ti/SiO/sub 2//Si substrate”, Materials Letters, 47 (4-5), (2001)219

44. X.Z. Duo, W.L. Liu, M. Zhang, L.W. Wang, C.L. Lin, M. Okuyama, M. Noda, W.Y. Cheung, S.P. Wong, P.K. Chu, P.G. Hu, S.X. Wang and L.M. Wang, “Evolution of hydrogen and helium co-implanted single-crystal silicon during annealing”, J. Appl. Phys., 90(8), (2001) 3780

45. L.W. Wang, R.K.Y. Fu, X.C. Zeng, P.K. Chu, W.Y. Cheung and S.P. Wong, “Damage in hydrogen plasma implanted silicon”, J. Appl. Phys. 90 (4), (2001)1735

46. Z.T. Song, J.X. Gao, X.R. Zhu, L.W. Wang, X.R. Fu and C.L. Lin, “Effects of excess Pb on structural and electrical properties of Pb(Zr/sub 0.48/Ti/sub 0.52/)O/sub 3/ thin films using MOD process”, J. Mater. Sci. 36(17), 4285(2001)

47. Q. Wan, L.W. Wang, W.L. Liu, M. Zhang, C.L. Lin, “ Investigation of H+ and B+/H+ implantation in LiTaO3 single crystals”, Nuclear Instrument and Methods in Physics Research B184, (2001)531.

48. Qing Wan, Ninglin Zhang, Lianwei Wang, Qinwo Shen and Chenglu Lin Preparation of PZT on diamond by pulsed laser deposition with Al₂O₃ buffer layerThin Solid Films, Volume 415, Issues 1-2, 1 August 2002, Pages 64-67

49.D. Crawley, K. Nikolic, M. Forshaw, J. Ackermann, C. Videlot, T.N. Nguyen, L. Wang, P.M. Sarro; 3D molecular interconnection technology J. Micromech. Microeng., Vol. 13, No. 5, 20 June 2003, pp. 655-662.

50.J. Ackermann, C. Videlot, T.N. Nguyen, L. Wang, P.M. Sarro, D. Crawley, K. Nikoli, M. Forshaw; Micro-patterning of self-supporting layers with conducting polymer wires for 3D-chip interconnection applications Applied Surface Science, Vol. 212-213, 15 May 2003, pp. 411-416.

51. M. Qian, X.Q. Bao, L.W.Wang, X. Lu, J. Shao and X.S. Chen, “Structural tailor of multilayer porous silicon for photonic crystal application” Journal of crystal Growth 292(2006)347-350

52. Z. Wang, L. Wang, N.T. Nguyen, W.A.H. Wien, H. Schellevis, P.M. Sarro and N.J. Burghartz, “Silicon micromachining of high aspect ratio, high density through-wafer electrical interconnects for 3D multichip Packaging”. IEEE Transaction on Advanced Packaging, 29 (2006), pp 615-622.

53. Xiao Wang, Xiaoming Chen, Zhenyin Yu, Lianwei Wang, A Novel Fabrication Approach for Microneedles Using Silicon Micromaching Technology, IEEE NTC Review of Advanced in Micro, Nano, and Molecular Engineering 1(1),pp.253-254,(2006)

54. Junxu Wu, Lianwei Wang, Xiaoming Chen, Mingjie Zheng, Weili Liu, Zhitang Song and P.M. Sarro, “Oxidation of Silicon Electrochemically Etched Microchannels Arrays”, IEEE NTC Review of Advanced in Micro, Nano, and Molecular Engineering 1(1),pp.183-184,(2006)

55. Zhejin Wang, Jie Zhang, Shaohui Xu, Lianwei Wang, Zhishen Cao, PengZhan, Zhenlin Wang, “1-D partially oxidized porous silicon photonic crystal reflector for mid-infrared application”, J. Phys. D: Appl. Phys. 40 (2007) 4482-4484

56. Xiaoming Chen, Jilei Lin , Ding Yuan , Pengliang Ci, Peisheng Xin, Shaohui Xu and Lianwei Wang, “Obtaining of high area-ratio free-standing silicon microchannel plate via modified electrochemical procedure”, J. Micromach. & Microeng. 18 (2008) 037003

57. ZHANG Jie, XU Shaohui, YANG Shiqian, WANG Lianwei, CAO Zhishen, ZHAN Peng, WANG Zhenlin, “A stable porous silicon dielectric reflector with a photonic band gap centered at 10 μm”, Chin. Phys. Lett. Vol. 25, No. 4 (2008) 131

58. S. H. Xu and L. W. Wang Porous silicon microtube structures induced by anisotropic strain JOURNAL OF APPLIED PHYSICS 106, 073516 (2009)

59. Shaohui Xu∗, Xiao Feng, LianweiWang, Ziqiang Zhu, Silver-coated silicon nano-particles prepared by thermal decomposition, Journal of Materials Processing Technology 209 (2009) 4080–4083

60. MIAO Feng-Juan, ZHANG Jie, XU Shao-Hui(, WANG Lian-Wei, CHU Jun-Hao, CAO Zhi-Shen, ZHAN Peng(, WANG Zhen-Lin, An Array of One-Dimensional Porous Silicon Photonic Crystal Reflector Islands for Far-Infrared Image Detector, CHIN. PHYS. LETT. Vol. 26, No. 4 (2009) 044207

61. Fengjuan Miao, Bairui Tao, Tao Liu, Li Sun, Jinchuan You, Lianwei Wang，P.K.Chu，Amperometric Glucose Sensor based on 3D Ordered Nickel-Palladium Nanomaterial Supported by Silicon MCP Array， Sensor & Actuator B, chemical 141 (2009) 338–342

62. Fengjuan Miao , Bairui Tao , Lianwei Wang and Paul K. Chu, 3D Ordered NiO / Silicon MCP Array Electrode Materials for Electrochemical Supercapacitors, Material Research Bulletin, 44 (2009) 1920–1925

63. Ding Yuan, Pengliang Ci, Fei Tian, Jing Shi, Shaohui Xu, Peisheng Xin and Lianwei Wang, Paul K Chu, Large Size P-type Silicon Microchannel Plates Prepared by Photo-Electrochemical Etching, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), 8（3）（2009）033012

64. Fengjuan Miao, Bairui Taoa, Li Sun, Tao Liu, Jinchuan You, LianweiWang,, Paul K. Chu, Preparation and characterization of novel nickel–palladium electrodes supported, by silicon microchannel plates for direct methanol fuel cells, Journal of Power Sources 195 (2010) 146–150

65. S.H. Xu,L.W. Wang, Study on the thermal isolation properties of porous silicon photonic crystal, Appl Phys A (2010) 98: 67–73

66. Fengjuan Miao, Bairui Tao, Li Sun, Tao Liu, Jinchuan You, Lianwei Wang, Paul K. Chu, Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites Sensors and Actuators A 160 (2010) 48–53

67. Tao Liu, Huayan Zhang, Fei Wang, Jing Shi, Pengliang Ci, Lianwei Wang, Shuli Ge, Qingjiang Wang, Paul K. Chu， Three-dimensional supercapacitors composed of Ba_0.65Sr_0.35TiO₃ (BST) /NiSi₂/silicon microchannel plates， Materials Science and Engineering B . 176 (2011) 387–392

68. Pengliang Ci, Jing Shi, Fei Wang, Shaohui Xu, Zhenya Yang, Pingxiong Yang, Lianwei Wang, Paul K. Chu, Novel thermoelectric materials based on boron-doped silicon microchannel plates, Materials Letters 65 (2011) 1618–1620

69. Jing Shi, Pengliang Ci, Fei Wang, Hui Peng, Pingxiong Yang, Lianwei Wang, Shuli Geb, Qingjiang Wang, Paul K. Chu, Nonenzymatic Glucose Sensor Based on Over-Oxidized Polypyrrole Modified Pd/Si Microchannel Plate Electrode， Biosensors and Bioelectronics 26 (2011) 2579–2584

70. Jing Shi, Pengliang Ci, Fei Wang, Hui Peng, Pingxiong Yang, Lianwei Wang, Qingjiang Wang and Paul K. Chu, Pd/Ni/Si-microchannel-plate-based amperometric sensor for ethanol detection， Electrochimica Acta, 56(2011) 4197–4202

71. Pengliang Ci, Jing Shi, Fei Wang,Shaohui Xu, Zhenya Yang, PingxiongYang, Lianwei Wang & Paul K. Chu Fabrication and Characterization of Silicon Microchannel Plates as Temperature-Sensing Materials, Journal of Elec Materi (2011)40:2363-2367

72. Tao Liu, Shaohui Xu, Lianwei Wang*, Junhao Chu, Qingjiang Wang, Xiangrong, Zhu, Naici Bing, Paul K. Chu, Miniature Supercapacitors Composed of Nickel/Cobalt Hydroxide on Nickel-Coated Silicon Microchannel Plates, Journal of Materials Chemistry, 21, 19093(2011)

73. Bobo Peng, Fei Wang, Tao Liu, Zhenya Yang, Lianwei Wang*, Ricky K.Y. Fu, and Paul K. Chu，Novel method of separating macroporous arrays from p-type silicon substrate, Journal of Semiconductors 33(4) 043004-(1-4) (2012)

74. Mai Li,Shaohui Xu, Tao Liu,,Fei Wang, Pingxiong Yang, Lianwei Wang* and Paul K. Chu, Electrochemically-deposited nanostructured Co(OH)₂ flakes on three-dimensional ordered nickel/silicon microchannel plates for miniature supercapacitors, J. Mater. Chem. A 1,532(2013)

75. Fei Wang, Shaohui Xu, Shanshan Zhu, Hui Peng, Rong Huang, Lianwei Wang∗, Xiaohua Xie, Paul K. Chu, Ni-coated Si microchannel plate electrodes in three-dimensional lithium-ion battery anodes, Electrochimica Acta 87, 250– 255(2013)

76. Fei Wang, Shanshan Zhu, Mai Li, Xuefeng Lou, Keshuang Hui, Shaohui Xu, Pingxiong Yang, Lianwei Wang, Yiwei Chen, Paul K. Chu. Anode properties and morphology evolution of three-dimensional lithium-ion battery electrodes comprising Ni-coated Si microchannel plates[J]. Journal of Alloys and Compounds 2013,563:186-191.

77.Shaohui Xu, Fei Wang, Li Mai, Lianwei Wang, Paul K. Chu. Electrochemical analysis of nickel electrode deposited on silicon microchannel plate. Electrochimica Acta. 2013, 90:344-349.

Conferences and Workshop

78.Lu-HX; Liu-RC; Jiang-J; Wang-LW; Hsia-YF; Gonser-U, The effect of oxidized surface layers on the inner core of fine iron particles, ICAME '91: International Conference on the Applications of the Mossbauer Effect. 16-20 Sept. 1991; Nanjing, China. published in : Hyperfine-Interactions. vol.68, no.1-4; April 1992; p.373-6.

79. Lianwei Wang, Chenglu Lin, Ping Liu, Zuyao Zhou and Shichang Zou, "The effect of Si, F implantation on the formation and light emitting properties of porous silicon", Mater. Res. Soc. Symp. Proc. 316, 445(1994)

80. JP Huang, LW Wang, J Wen, YX Wang, CL Lin, Carl-Mikael Zetterling and Mikael Östling, “Growth of SiC film on (100) and (111) silicon by pulsed laser deposition combined with a vacuum annealing process”, Mater. Res. Soc. Symp. Proc. 572, (1999)207.

81. Duan-M; Frojdh-C; Thungstrom-G; Wang-LW; Linnros-J; Petersson-CS, : Deposition of scintillating layers of bismuth germanate (BGO) films for X-ray detector applications, 1997 IEEE Nuclear Science Symposium Conference. p.845-7 vol.1.

82. Lianwei-Wang; Chenglu-Lin; Xiangdong-Chen; Shichang-Zou; Zuyao-Zhou; and Xianghuai-Liu, A study on the As redistribution in beta -FeSi/sub 2/ film prepared by reactive deposition epitaxy, Ion Implantation Technology - 96. Proceedings of the Eleventh International Conference on Ion Implantationp.721-4.

83. Lianwei-Wang; Chenglu-Lin; Qinwo-Shen; Rushan-Ni; Xiangdong-Chen; Shichang-Zou; Ostling-M, Growth mechanism of beta -FeSi/sub 2/ by reactive deposition epitaxy, Proceedings 1995 4th International Conference on Solid-State and Integrated Circuit Technology,p.230-2.

84. W-Ping-Xu; Lianwei-Wang; Huoping-Xin; Lirong-Zheng; Chenglu-Lin, Hydrothermal preparation of BaTiO/sub 3/ thin film on silicon, Proceedings of 1995 4th International Conference on Solid-State and Integrated Circuit Technology. p.278-80

85. L. Wang, A. Nichelatti, H. Schellevis, C. de Boer, C. Visser, T.N. Nguyen, P.M. Sarro; High Aspect Ratio through-Wafer Interconnections for 3D-Microsystems Proc. 16th IEEE International MEMS conference, January 19-23, 2003, Kyoto, Japan, pp. 634-637.

86.Y. Chen, L.W.Wang, andP.M. Lina, Highly controllable electrochemical deep etching process on silicon, IEEE MEMS 2005, Jan.30-Feb.3, Miami, USA, pp 512-515.

87.Yu Chen, Pingsheng Guo, Lianwei Wang，Influence of experimental environment on the process of photo-assisted electrochemical etching process on silicon, Proceeding of SPIE Vol. 5774, pp.573-576. TFPA2004, May 31-Jun.2 2004, Shanghai

88.X. Q. Bao, Y. F. Ding, Y. Chen, P. S. Guo, Y. L. Shi, L.W. Wang, Z. S. Lai, Transfer Bonding of Thick Silicon Nitride Film Via Split of Porous Silicon, Proceeding of SPIE Vol.5774, pp.577-580. TFPA2004, May 31-Jun.2 2004, Shanghai

89.Deyan Peng, Guodong Li, Lianwei Wang and Zongsheng Lai. Index-compatible design of multiplayer film for MEMS-type variable optical attenuator, Proceeding of SPIE Vol.5774, pp.603-606. TFPA2004, May 31-Jun.2 2004, Shanghai

90. Z. Wang, L. Wang, H. Schellevis, W. Wien, J.N. Burghartz, P.M. Sarro; Through-Wafer Electrical Vias for RF Silicon technology Proc. SAFE 2003, November 25-26, 2003, Veldhoven, the Netherlands, ISBN 90-73461-39-1, pp. 761-765.

91. L. Wang, C.C.G. Visser, C.R. de Boer, M. Laros, W. van der Vlist, J. Groeneweg, G. Craciun, P.M. Sarro; Wafer thinning for high-density, through-wafer interconnects Proc. of SPIE Vol. #4979 - Micromachining and Microfabrication Process Technology VIII, 27-29 January 2003, San Jose, CA, ISSN 0277-786X, pp. 532-539.

92. L. Wang, C.C.G. Visser, C. de Boer, M. Laros, W. van der Vlist, J. Groeneweg, G. Craciun, P.M. Sarro; Thinning of Micromachined Wafers for High-Density, Through-Wafer Interconnects Proc. SAFE 2002, November 27-28, 2002, Veldhoven, The Netherlands, Publ. STW, ISBN 90-73461-33-2, pp. 121-126.

93.Lianwei Wang and Pasqualina M. Sarro. “ Wafer thinning for highly dense 3D electronic structure”, Proceedings of SAFE 2001, 28-29 Nov. 2001, Veldhoven, The Netherlands, pp.214-219. ISBN 90-73461-29-4.

94. Zhejin Wang, Lianwei Wang, Yuxiang Zheng, Xiaoshuang Chen^,, “Fabrication of IR Reflectors by Porous Silicon Technique”, IEEE ICSICT2006, Oct. 23-26, 2006,Shanghai, China, pp.1010-1012

95. Jinlong Li, Shaohui Xu, Xinping Qu, Guoping Ru, Zhengyin Yu, Weili Liu, Zhitang Song and Lianwei Wang, “A 3D pn junction structure for radiation energy conversion chip”, IEEE IJWT2006, pp123-6, May 2006, Shanghai.

96. Xiao Wang, Xiaoming Chen, Zhenyin Yu, Lianwei Wang, A Novel Fabrication Approach for Microneedles Using Silicon Micromaching Technology, Proc. IEEE-NEMS 2006 , pp. 547-550, The 1^st IEEE-NEMS, January 18-21 2006, Zhuhai, China

97. Junxu Wu, Lianwei Wang, Xiaoming Chen, Mingjie Zheng, Weili Liu, Zhitang Song and P.M. Sarro, “Oxidation of Silicon Electrochemically Etched Microchannels Arrays”, Proc. of IEEE-NEMS 2006 , pp. 399-342, The 1^st IEEE-NEMS, January 18-21 2006, Zhuhai, China

98. Liang Xu, Jinchuan You, Lianwei Wang，”Investigation of Nanostructure on silicon by electrochemical etching”Sixth International Conference on Thin Film Physics and Applications, edited by Wenzhong Shen, Junhao Chu, Proceedings of SPIE Vol. 6984, PSI69842Z, (2008)

99. Tingting Liu,Tao Liu,Jinlong Li,Xiaoming Chen,Xinglong Guo,Peisheng Xin,Shaohui Xu,and Lianwei Wang, “Fabrication and characterization of 3D pn junction structure for radiation detection”, Sixth International Conference on Thin Film Physics and Applications, edited by Wenzhong Shen,Junhao Chu, Proceedings of SPIE Vol.6984,69843M(Mar.11,2008)

100.Shuqin Ding, Xiaodong Zhang, Xiaoming Chen, Lianwei Wang, “A Beam Operated MEMS Variable Optical Attenuator”, Sixth International Conference on Thin Film Physics and Applications, edited by Wenzhong Shen, Junhao Chu, Proceedings of SPIE Vol. 6984, 69843N, (2008)

101.Lin Jilei, Xiaoming Chen, Shaohui Xu, Peisheng Xin and Lianwei Wang, “Investigation of the Formation of undercut during the Fabrication of Silicon Microchannel by Electrochemical Etching”, Proceedings of IEEE NEMS 2008, pp.84-87, The 3st IEEE-NEMS, January 6-9 2008, Sanya, China (EI)extended abstract to be published in IEEE NTC Review of Advanced in Micro, Nano, and Molecular Engineering.

102.Xiaoming Chen, Jilei Lin, Shaohui Xu, Peisheng Xin, and Lianwei Wang, “Oxidation of High Area Ratio Silicon Microchannels Fabricated by Electrochemical Etching”, Proceedings of IEEE-NEMS 2008 , pp. 78-81, The 3st IEEE-NEMS, January 6-9 2008,Sanya, China (EI), extended abstract to be published in IEEE NTC Review of Advanced in Micro, Nano, and Molecular Engineering.

103.Fengjuan Miao, Jie Zhang, Shaohui Xu, Lianwei Wang, Junhao Chu, Zhishen Cao, Peng Zhan and ZhenlinWang, Fabrication of a reflective mirror within wide incidence angles for mid-infrared wavelength, META08 - Proceedings of the 2008 International Workshop on Metamaterials p 173-176, 2008

104.Ding Yuan\ Pengliang Ci\ Fei Tian\ ling Shi\ Shaohui Xu\ Peisheng Xinl and Lianwei Wangl The Improvement of Electrochemical Etching Process for Silicon Microchannel Plates Proceedings of the 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems January 5-8, 2009, Shenzhen, China, p.964

105.Jing Shi, Jinchuan You , Lianwei Wang Paul K. Chu, Theoretical Investigation of Three Dimensional p-n Junctions for Improvement of Silicon Solar Cell Efficiency, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information, Display Technologies, edited by Michael Grätzel, Hiroshi Amano, Chin Hsin Chen, Changqing Chen, Peng Wang, Proc. of SPIE Vol. 7518 751816-1

106.Jinchuan You, Jing Shi, Bobo Peng, Lianwei Wang, Investigation of photo electrochemical etching of textured silicon in solar cells, Photonics and Optoelectronics Meetings (POEM) 2009: Solar Cells, Solid State Lighting, and Information, Display Technologies, edited by Michael Grätzel, Hiroshi Amano, Chin Hsin Chen, Changqing Chen, Peng Wang, Proc. of SPIE Vol. 7518 75180M-1

107.Li Sun，Fengjuan Miao，Lianwei Wang, P.K. Chu and P.M. Sarro，Thermoelectric behavior of microchannel plates fabricated by photo-assisted electrochemical etching ，Proceeding of 23rd IEEE International MEMS Conference, Jan. 24-28, 2010,Wanchai, Hong Kong China , pp. 576-579

108.Tao Liu, Li Sun, Jia Lai, Lianwei Wang, Zhouguang Lu, Jonathan C.Y.Chung, Paul K.Chu, “Preparation of Ni Current Collector and MoS₂ Cathode in Three-Dimensional Li Ion Microbattery Based on Silicon MCP,” The 5th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Jan. 21-23, 2010, Xiamen, China, pp 118-121

111.Pengliang Ci, Jing Shi, Li Sun, Tao Liu, Lianwei Wang, and Paul K. Chu, Investigation of Inner Surface of Silicon Microchannels Fabricated by Electrochemical Method , Journal of Nanoscience and Nanotechnology Vol. 11, 11045–11048, 2011

112.P L Ci, J Shi, F Wang, L Sun, S H Xu, P X Yang, L W Wang and Paul K Chu Thermoelectric Properties of Silicon Microchannel Plates Structures Journal of Physics:ConferenceSeries 276 (2011) 012043

113.Wenchao Zhang; XiaoweiWang; Hongzheng Peng;LianweiWang; Bobo PengPreparation and properties of micro-energetic device for MEMSArtificial Intelligence, 2011 2nd International Conference on Management Science and Electronic Commerce (AIMSEC), Page(s): 480 - 483

114.Y.Z. Jing, B.B. Peng, T. Liu, F. Wang, L.W. Wang, Paul K. Chu, Electrodeposited Pd/Ni/Si micro-channel plate electrode for hydrogen peroxide detection and Application, IEEE Conf. On Sensor 2012, Taipei, 406-409

115.Shanshan Zhu,Shaohui Xu, Fei Wang, Lianwei Wang *, Improvingthe performanceof lithium-ion batterythrough dopingthe conductive agent in porous LiFePO₄, 11th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), 2012, Xi’an

116.Fei Wang, Shaohui Xu, Shanshan Zhu, Lianwei Wang *,Fabrication and Characterization of Boron-Doped Silicon Microchannel Plates as Lithium-Ion Microbatteries Anodes11th IEEE International Conference on Solid-State and Integrated Circuit Technology (ICSICT), 2012, Xi’an

Others:

117.周梅、陈效双、徐靖、曾勇、吴砚瑞、陆卫、王连卫、陈瑜，”中红外波段硅基两维光子晶体的光子带隙”，物理学报， Vol.54 No.1，pp.411-415(2005)

118.陈瑜，吴俊徐，郭平生，王连卫，M. van der Zwan, P.M. Sarro, “一种用于硅基MEMS加工的深刻蚀技术”，微细加工技术， 2005年第4期，pp. 37-41

119.包晓清，钱敏，王连卫，朱自强， “基于p型多孔硅的一维光子晶体的微结构分析”，功能材料与器件学报，Vol. 12 (1),(2006)59-62

120.王哲津、石荣，王连卫，“微型直接甲醇燃料电池研究进展”，节能与环保，2006年第8期，pp 26-28

121.郑正奇，岳鹏，王连卫，张洁, “PZT／PVDF柔性复合材料用于ISM天线研究,” 华东师范大学学报（自然科学版）No.1, Jan. 2009, 124(2009)

122.田菲，袁丁，王连卫, “自分离硅微通道的氧化”, 功能材料与器件学报 Vo1．15．No．5, 483 (2009)

123.刘涛，王斐，徐少辉，王连卫, “覆镍硅微通道板用于三维超级电容器的研究”, 华东师范大学学报（自然科学版）No.5, Sep.2012, 1 (2012)