About
EducationWorkExperienceResumeOther AppointmentsResearch FieldsMicro- nano- mechanical system Material and device for energy storage system Noval sensor technology Enrollment and TrainingCourseScientific ResearchAcademic AchievementsMain awards: 2005, The first award for the progress of science and technology by Shanghai government.( Line 9)(上海市科技进步一等奖(排名第9)) 2006, The first award for the progress of science and technology by the Peoples’ Republic of China,(Line 11) (国家科技进步一等奖(排名第11)) List of PublicationsJournals1. Lianwei Wang, M. Östling, Kai Yang, Linhong Qin, Chenglu Lin, Xiangdong Chen, Shichang Zou, Yuxiang Zheng and Youhua Qian, "Optical transitions in b-FeSi2 films", Phys. Rev. B 54 (16), 11126R(1996) 2. Lianwei Wang, Linhong Qin, Yuxiang Zheng, Wenzhong Shen, Xiangdong Chen, Xian Lin, Chenglu Lin and Shichang Zou, "Optical transition properties of b-FeSi2 film"Appl. Phys. Lett. 65(24), 3105(1994) 3. Lianwei Wang, Chenglu Lin, Qinwo Shen, Xian Lin, Rushan Ni and Shichang Zou "Reactive deposition epitaxial growth of b-FeSi2 film on Si(111): in situ observation by reflective high energy electron diffraction",Appl. Phys. Lett. 66(25),3453(1995) 4. X.D. Chen, Lianwei Wang, Q.W. Shen, R.S. Ni and Chenglu Lin, "Characterization of FeSixprepared by codeposition on b-FeSi2 template". Appl. Phys. Lett. 68(20), 2858(1996) 5. Lianwei Wang, Chenglu Lin, X.D. Chen, S.C. Zou, L.H. Qin, H.T. Shi, W.Z. Shen and M. Östling, "A clarification of the optical transition of b-FeSi2 film", Solid State Communications97, 385(1996) 6. W.Z. Shen, S.C. Shen, W.G. Tang and Lianwei Wang, "Optical and photoelectric properties of *-FeSi2film", J. Appl. Phys. 78(7), 4793(1995) 7. H.P. Xin, C.L. Lin, W-Ping Xu, L.W. Wang, S.C. Zou, X.L. Wu, X.H. Shi and H.Zhu, "Structural properties of carbon nitride films prepared by high dose nitrogen implantation into carbon thin film", J. Appl. Phys. 79(5), (1996) 8. Rongchuan-Liu; Huaixian-Lu; Lianwei-Wang; Yuanfu –Hsia, Mossbauer study and magnetic characterization of the oxidized surface layer of fine iron particles, Nuclear-Instruments-&-Methods-in-Physics-Research,-Section-B-(Beam-Interactions-with-Materials-and-Atoms). vol.B76, no.1-4; April 1993; p.140-2 9. C.L. Lin, L.W. Wang, X.D. Chen, L.M. Wang and L.F. Chen, "Structural characterization of codeposition growth FeSi2 films", Jpn. J. Appl. Phys.37, 622(1998) 10. D. Mangelinck, L.Wang, J. Grahn,P.Gas, C. Lin and M. Ostling, "Influence of the addition of Co and Ni on the formation of epitaxial semiconducting b-FeSi2, comparison of different methods", J. Appl. Phys. 83,4193(1998) 11. Rushan Ni, Lianwei Wang, Qinwo Shen and Chenglu Lin, "Structural characterization ofb-FeSi2 films on Si(100) prepared by reactive deposition solid phase epitaxy",J. Trace and Microprobe Techniques, 15(4) , 541(1997) 12. W.Z. Shen, W.G. Tang, ,Z.Y. Li, S.C. Shen and Lianwei Wang, "Study of Characteristics of photocurrent spectra of b-FeSi2 thin film", Phys. Stat. Solidi (b)187, 511(1995) 13. Lianwei Wang, Qinwo Shen, Xiangdong Chen, Xian Lin, Chenglu Lin, and Shichang Zou, "Synthesis of b-FeSi2 film by reactive deposition solid phase epitaxy",Chinese Phys. Lett. 12(5), 301(1995) 14. Lianwei Wang, Chenglu Lin, Qinwo Shen, Rushan Ni and Shichang Zou, "Reactive deposition epitaxial growth of b-FeSi2 film on Si(001): in situ observation by reflective high energy electron diffraction", Chinese Phys. Lett.12(10), 613(1995) 15. W.Z. Shen, Lianwei Wang, W.G. Tang, Z.Y. Li and S.C. Shen, "Photocurrent studies of b-FeSi2 thin films", Chinese Phys. Lett. 12(1), 34(1995) 16. Xiangdong Chen, Lianwei Wang, Xian Lin, Chenglu Lin and Shichang Zou, "The Influence of Annealing on the Formation ofb-FeSi2 ",(in Chinese)Chinese Journal of Semiconductor 16(10), 794 (1995) 17. Lianwei Wang, Qinwo Shen, Xian Lin, Chenglu Lin, Shichang Zou and Zhicheng Zhuang, " b-FeSi2/ SIMOX, A novel structure optoelectronic material",(in Chinese) Chinese Journal of Semiconductor 17, 201(1996) 18. Y.F. Chen, L.Sun, T. Yu, J.X. Chen, D.S. Ding and L.W. Wang, "Single Crystalline, single domain epitaxy of PbTiO3 thin films by metalorganic chemical vapor deposition" Appl. Phys. Lett. 67(23), 3503(1995) 19. L. Sun, Y.F. Chen, W.H. Ma, L.W. Wang, T. Yu, M.S. Zhang, and N.B. Ming, "Evidence of ferroelectricity weakening in the polycrystalline PbTiO3 thin film", Appl. Phys. Lett. 68(26), 3729(1996) 20. Pingxiong Yang, Lirong Zheng, Lianwei Wang and Chenglu Lin, "Influence of annealing on crystal structure and properties of SrBi2Ta2O9 thin film prepared by pulsed laser deposition", Chinese Physics Letters, 13(12),934 (1996) 21. Pingxiong Yang, Lirong Zheng, Lianwei Wang, Chenglu Lin, Ningsheng Zhou and Huaixian Lu, "Fabrication of ferroelectric SBT thin film by pulse excimer laser deposition", (in Chinese) Chinese Journal of Laser, 24(7), 397 (1997) 22. L.R. Zheng, P.X. Yang, L.W. Wang, C.L. Lin and S.C.Zou, " A study of oxygen ion implantation into ferroelectric Pb(Zr,Ti)O3 films", Nucl. Instr.Method in Phys.Res.B127, (1997)621 23. Miao Zhang, Lianwei Wang, Zuyao Zhou, Zixin Lin and Chenglu Lin, "Annealing properties of crystalline silicon implanted with high dose of proton", Phys. Stat. Sol. (a)165,361(1998) 24. Miao Zhang, Lianwei Wang, Jianxia Gao, Chenglu Lin, P.L.F. Hemment, K. Gutjahr and U. Gösele, "Gettering of Cu by He-induced cavity in SIMOX materials" Nucl. Instr. Method in Phys. Res. B, (134)3-4 (1998) pp. 360-364 25. M.Duan, C. Frojdh, G. Thungstromm, L.W.Wang, J.Linnros and C.S. Petersson, “Deposition of scintillating layers of bismuth germanate (BGO) films for X-ray detector application", IEEE Transactions on Nuclear Sciences 45(3) (1998)525 26. .JP Huang, LW Wang, QW Shen JX Gao RS Ni and CL Lin, "C-axis oriented AlN thin film on silicon prepared by ultrahigh vacuum evaporation of Al combined with post-nitridation", Chin. Phys. Lett. 15, (1998)732 27. M Zhang, JM Zeng, JP Huang LW Wang and CL Lin, Nanocavity on effective gettering method for SIMOX wafer”,Chin. Phys. Lett. 15(1998)516 28. JP Huang, LW Wang, QW Shen, CL Lin and Mikael Östling, "Structural and electrical characterisation of AlN thin film obtained by nitridation of Al/Si substrate", Journal of Electronic Materials 28,(1999)223 29. JP Huang, LW.Wang, QW.Shen, CL.Lin and M. Östling, "Preparation of AlN thin films by nitridation of Al-coated Si substrate", Thin Solid Films 340, (1999)137 30. JM Zeng, M. Zhang, LW Wang, and CL Lin, "Influence of lead titanate layer on orientation behavior and ferroelectric characteristics of sol-gel derived PZT thin films, Journal of Physics, Condensed matter 11, (1999)1139. 31. JM Zeng, SG Song, LW Wang, M.Zhang, LR Zheng and CL Lin, "Sol-gel preparation of Pb(Zr0.50Ti0.50)O3 ferroelectric thin films using zirconium oxynitrate as the zirconium source,"Journal of American Ceramic Society, 82(2), (1999) 32. JM Zeng, LW Wang, JX Gao, ZT Song, XR Zhu and CL Lin, "Structural and electrical characteristics of oriented Pb(Zr0.52Ti0.48)O3 ferroelectric thin films deposited on diamond substrate by a simple sol-gel process", Journal of Crystal Growth 197(1999)874 33. LW Wang, JP Huang, CL Lin, SC Zou, YX Zheng, XJ Wang, DM Huang, C.Zetterling and M.Östling, "A Study of Optical Characteristics of Damage in Oxygen-Implanted 6H-SiC", Journal of Materials Sciences Letters, 18, (1999)979-982 34. JP HuangLW Wang, J.Wen, YX Wang, CL Lin and M.Östling, Effect of Annealing on SiC thin film prepared by pulsed laser deposition”, Diamond and Related Materials 8, (1999)2099 35. ZT Song, CL Lin, JP Huang, LW Wang JM Zeng, JX Gao, HP Xu and M Okuyama, “Variation of the microstructure and morphology with oxygen pressure in Ba0.51Sr0.48La0.01Nb2O6 thin film prepared by pulsed laser deposition”,Materials Letters, 40,(1999)83 36. JX Gao, LR Zheng,ZT Song, LW Wang, LX Yang,DZ Zhu and Chenglu Lin, “Characteristics of Au/PbZr0.52Ti0.48O3/Yba2Cu3O7-d capacitors fabricated on LaAlO3 and Y2O3-stabilized ZrO2 substrate during irradiation”, Philosophical Magazine B, 79, (1999)829 37. LW Wang, JP Huang, XZ Duo, ZT Song, CL Lin, CM Zetterling and M Östling, “Invsetigation of damage behaviour and isolation effect of n-type 6H-SiC by implantation of oxygen”, J. of Phys. D, Appl. Phys., 33, (2000)1551 38. LW Wang, JP Huang, XZ Duo, ZT Song, CL Lin, CM Zetterling and M.Östling, “Structural and electrical characteristics of oxygen implanted 6H SiC”, Nuclear Instruments and Methods in Physics Research B 169, (2000)1. 39. Jianxia Gao, Lirong Zheng, Xiangrong Zhu, Lianwei Wang, Chenglu Lin and Dezhang Zhu, “Asymmetry of the hysteresis loops for the Au/PbTiO3/YBa2Cu3O7- 40. W.L. Liu, M.Zhang, C.L. Lin, Z.M. Zeng, LW Wang and P.K. Chu, “Intense blue-light emission from carbon-plasma-implanted porous silicon”, Appl. Phys. Lett. 78, (2001)37 41. X.Z. Duo, W.L. Liu, M.Zhang, L.W. Wang, C.L. Lin, M. Okuyama, M. Noda, W.Y. Cheung, P.K. Chu, P.G. Hu, S.X. Wang and L.M. Wang, “Comparison between the different implantation orders in H/sup +/ and He/sup +/ coimplantation”,J.Phys. D, Applied Physics, 34 (4), (2001)477 42. W. L. Liu, X. Z. Duo, L.W. Wang, M. Zhang, Q. W. Shen, C. L. Lin, and P. K. Chu, "SOI Structure Fabricated by Ultra Vacuum Electron Beam Evaporation of Si on Porous Si and Epitaxial Layer Transfer", Chinese Physics Letters, vol. 18(5), pp. 662 - 664 (2001). 43. Z.T. Song, C.L. Lin, L.W. Wang, S.X. Wang, L.M. Wang, J.X. Gao and X.R. Fu, “Microstructural and electrical properties in textured lead calcium lanthanum titanate thin films deposited on a Pt/Ti/SiO/sub 2//Si substrate”, Materials Letters, 47 (4-5), (2001)219 44. X.Z. Duo, W.L. Liu, M. Zhang, L.W. Wang, C.L. Lin, M. Okuyama, M. Noda, W.Y. Cheung, S.P. Wong, P.K. Chu, P.G. Hu, S.X. Wang and L.M. Wang, “Evolution of hydrogen and helium co-implanted single-crystal silicon during annealing”, J. Appl. Phys., 90(8), (2001) 3780 45. L.W. Wang, R.K.Y. Fu, X.C. Zeng, P.K. Chu, W.Y. Cheung and S.P. Wong, “Damage in hydrogen plasma implanted silicon”, J. Appl. Phys. 90 (4), (2001)1735 46. Z.T. Song, J.X. Gao, X.R. Zhu, L.W. Wang, X.R. Fu and C.L. Lin, “Effects of excess Pb on structural and electrical properties of Pb(Zr/sub 0.48/Ti/sub 0.52/)O/sub 3/ thin films using MOD process”, J. Mater. Sci. 36(17), 4285(2001) 47. Q. Wan, L.W. Wang, W.L. Liu, M. Zhang, C.L. Lin, “ Investigation of H+ and B+/H+ implantation in LiTaO3 single crystals”, Nuclear Instrument and Methods in Physics Research B184, (2001)531. 48. Qing Wan, Ninglin Zhang, Lianwei Wang, Qinwo Shen and Chenglu Lin Preparation of PZT on diamond by pulsed laser deposition with Al2O3 buffer layerThin Solid Films, Volume 415, Issues 1-2, 1 August 2002, Pages 64-67 49.D. Crawley, K. Nikolic, M. Forshaw, J. Ackermann, C. Videlot, T.N. Nguyen, L. Wang, P.M. Sarro; 3D molecular interconnection technology J. Micromech. Microeng., Vol. 13, No. 5, 20 June 2003, pp. 655-662. 50.J. Ackermann, C. Videlot, T.N. Nguyen, L. Wang, P.M. Sarro, D. Crawley, K. Nikoli, M. Forshaw; Micro-patterning of self-supporting layers with conducting polymer wires for 3D-chip interconnection applications Applied Surface Science, Vol. 212-213, 15 May 2003, pp. 411-416. 51. M. Qian, X.Q. Bao, L.W.Wang, X. Lu, J. Shao and X.S. Chen, “Structural tailor of multilayer porous silicon for photonic crystal application” Journal of crystal Growth 292(2006)347-350 52. Z. Wang, L. Wang, N.T. Nguyen, W.A.H. Wien, H. Schellevis, P.M. Sarro and N.J. Burghartz, “Silicon micromachining of high aspect ratio, high density through-wafer electrical interconnects for 3D multichip Packaging”. IEEE Transaction on Advanced Packaging, 29 (2006), pp 615-622. 53. Xiao Wang, Xiaoming Chen, Zhenyin Yu, Lianwei Wang, A Novel Fabrication Approach for Microneedles Using Silicon Micromaching Technology, IEEE NTC Review of Advanced in Micro, Nano, and Molecular Engineering 1(1),pp.253-254,(2006) 54. Junxu Wu, Lianwei Wang, Xiaoming Chen, Mingjie Zheng, Weili Liu, Zhitang Song and P.M. Sarro, “Oxidation of Silicon Electrochemically Etched Microchannels Arrays”, IEEE NTC Review of Advanced in Micro, Nano, and Molecular Engineering 1(1),pp.183-184,(2006) 55. Zhejin Wang, Jie Zhang, Shaohui Xu, Lianwei Wang, Zhishen Cao, PengZhan, Zhenlin Wang, “1-D partially oxidized porous silicon photonic crystal reflector for mid-infrared application”, J. Phys. D: Appl. Phys. 40 (2007) 4482-4484 56. Xiaoming Chen, Jilei Lin , Ding Yuan , Pengliang Ci, Peisheng Xin, Shaohui Xu and Lianwei Wang, “Obtaining of high area-ratio free-standing silicon microchannel plate via modified electrochemical procedure”, J. Micromach. & Microeng. 18 (2008) 037003 57. ZHANG Jie, XU Shaohui, YANG Shiqian, WANG Lianwei, CAO Zhishen, ZHAN Peng, WANG Zhenlin, “A stable porous silicon dielectric reflector with a photonic band gap centered at 10 μm”, Chin. Phys. Lett. Vol. 25, No. 4 (2008) 131 58. S. H. Xu and L. W. Wang Porous silicon microtube structures induced by anisotropic strain JOURNAL OF APPLIED PHYSICS 106, 073516 (2009) 59. Shaohui Xu∗, Xiao Feng, LianweiWang, Ziqiang Zhu, Silver-coated silicon nano-particles prepared by thermal decomposition, Journal of Materials Processing Technology 209 (2009) 4080–4083 60. MIAO Feng-Juan, ZHANG Jie, XU Shao-Hui(, WANG Lian-Wei, CHU Jun-Hao, CAO Zhi-Shen, ZHAN Peng(, WANG Zhen-Lin, An Array of One-Dimensional Porous Silicon Photonic Crystal Reflector Islands for Far-Infrared Image Detector, CHIN. PHYS. LETT. Vol. 26, No. 4 (2009) 044207 61. Fengjuan Miao, Bairui Tao, Tao Liu, Li Sun, Jinchuan You, Lianwei Wang,P.K.Chu,Amperometric Glucose Sensor based on 3D Ordered Nickel-Palladium Nanomaterial Supported by Silicon MCP Array, Sensor & Actuator B, chemical 141 (2009) 338–342 62. Fengjuan Miao , Bairui Tao , Lianwei Wang and Paul K. Chu, 3D Ordered NiO / Silicon MCP Array Electrode Materials for Electrochemical Supercapacitors, Material Research Bulletin, 44 (2009) 1920–1925 63. Ding Yuan, Pengliang Ci, Fei Tian, Jing Shi, Shaohui Xu, Peisheng Xin and Lianwei Wang, Paul K Chu, Large Size P-type Silicon Microchannel Plates Prepared by Photo-Electrochemical Etching, Journal of Micro/Nanolithography, MEMS, and MOEMS (JM3), 8(3)(2009)033012 64. Fengjuan Miao, Bairui Taoa, Li Sun, Tao Liu, Jinchuan You, LianweiWang,, Paul K. Chu, Preparation and characterization of novel nickel–palladium electrodes supported, by silicon microchannel plates for direct methanol fuel cells, Journal of Power Sources 195 (2010) 146–150 65. S.H. Xu,L.W. Wang, Study on the thermal isolation properties of porous silicon photonic crystal, Appl Phys A (2010) 98: 67–73 66. Fengjuan Miao, Bairui Tao, Li Sun, Tao Liu, Jinchuan You, Lianwei Wang, Paul K. Chu, Capacitive humidity sensing behavior of ordered Ni/Si microchannel plate nanocomposites Sensors and Actuators A 160 (2010) 48–53 67. Tao Liu, Huayan Zhang, Fei Wang, Jing Shi, Pengliang Ci, Lianwei Wang, Shuli Ge, Qingjiang Wang, Paul K. Chu, Three-dimensional supercapacitors composed of Ba0.65Sr0.35TiO3 (BST) /NiSi2/silicon microchannel plates, Materials Science and Engineering B . 176 (2011) 387–392 68. Pengliang Ci, Jing Shi, Fei Wang, Shaohui Xu, Zhenya Yang, Pingxiong Yang, Lianwei Wang, Paul K. Chu, Novel thermoelectric materials based on boron-doped silicon microchannel plates, Materials Letters 65 (2011) 1618–1620 69. Jing Shi, Pengliang Ci, Fei Wang, Hui Peng, Pingxiong Yang, Lianwei Wang, Shuli Geb, Qingjiang Wang, Paul K. Chu, Nonenzymatic Glucose Sensor Based on Over-Oxidized Polypyrrole Modified Pd/Si Microchannel Plate Electrode, Biosensors and Bioelectronics 26 (2011) 2579–2584 70. Jing Shi, Pengliang Ci, Fei Wang, Hui Peng, Pingxiong Yang, Lianwei Wang, Qingjiang Wang and Paul K. Chu, Pd/Ni/Si-microchannel-plate-based amperometric sensor for ethanol detection, Electrochimica Acta, 56(2011) 4197–4202 71. Pengliang Ci, Jing Shi, Fei Wang,Shaohui Xu, Zhenya Yang, PingxiongYang, Lianwei Wang & Paul K. Chu Fabrication and Characterization of Silicon Microchannel Plates as Temperature-Sensing Materials, Journal of Elec Materi (2011)40:2363-2367 72. Tao Liu, Shaohui Xu, Lianwei Wang*, Junhao Chu, Qingjiang Wang, Xiangrong, Zhu, Naici Bing, Paul K. Chu, Miniature Supercapacitors Composed of Nickel/Cobalt Hydroxide on Nickel-Coated Silicon Microchannel Plates, Journal of Materials Chemistry, 21, 19093(2011) 73. Bobo Peng, Fei Wang, Tao Liu, Zhenya Yang, Lianwei Wang*, Ricky K.Y. Fu, and Paul K. Chu,Novel method of separating macroporous arrays from p-type silicon substrate, Journal of Semiconductors 33(4) 043004-(1-4) (2012) 74. Mai Li,Shaohui Xu, Tao Liu,,Fei Wang, Pingxiong Yang, Lianwei Wang* and Paul K. Chu, Electrochemically-deposited nanostructured Co(OH)2 flakes on three-dimensional ordered nickel/silicon microchannel plates for miniature supercapacitors, J. Mater. Chem. A 1,532(2013) 75. Fei Wang, Shaohui Xu, Shanshan Zhu, Hui Peng, Rong Huang, Lianwei Wang∗, Xiaohua Xie, Paul K. Chu, Ni-coated Si microchannel plate electrodes in three-dimensional lithium-ion battery anodes, Electrochimica Acta 87, 250– 255(2013) 76. Fei Wang, Shanshan Zhu, Mai Li, Xuefeng Lou, Keshuang Hui, Shaohui Xu, Pingxiong Yang, Lianwei Wang, Yiwei Chen, Paul K. Chu. Anode properties and morphology evolution of three-dimensional lithium-ion battery electrodes comprising Ni-coated Si microchannel plates[J]. Journal of Alloys and Compounds 2013,563:186-191. 77.Shaohui Xu, Fei Wang, Li Mai, Lianwei Wang, Paul K. Chu. Electrochemical analysis of nickel electrode deposited on silicon microchannel plate. Electrochimica Acta. 2013, 90:344-349. Conferences and Workshop 78.Lu-HX; Liu-RC; Jiang-J; Wang-LW; Hsia-YF; Gonser-U, The effect of oxidized surface layers on the inner core of fine iron particles, ICAME '91: International Conference on the Applications of the Mossbauer Effect. 16-20 Sept. 1991; Nanjing, China. published in : Hyperfine-Interactions. vol.68, no.1-4; April 1992; p.373-6. 79. Lianwei Wang, Chenglu Lin, Ping Liu, Zuyao Zhou and Shichang Zou, "The effect of Si, F implantation on the formation and light emitting properties of porous silicon", Mater. Res. Soc. Symp. Proc. 316, 445(1994) 80. JP Huang, LW Wang, J Wen, YX Wang, CL Lin, Carl-Mikael Zetterling and Mikael Östling, “Growth of SiC film on (100) and (111) silicon by pulsed laser deposition combined with a vacuum annealing process”, Mater. Res. Soc. Symp. Proc. 572, (1999)207. 81. Duan-M; Frojdh-C; Thungstrom-G; Wang-LW; Linnros-J; Petersson-CS, : Deposition of scintillating layers of bismuth germanate (BGO) films for X-ray detector applications, 1997 IEEE Nuclear Science Symposium Conference. p.845-7 vol.1. 82. Lianwei-Wang; Chenglu-Lin; Xiangdong-Chen; Shichang-Zou; Zuyao-Zhou; and Xianghuai-Liu, A study on the As redistribution in beta -FeSi/sub 2/ film prepared by reactive deposition epitaxy, Ion Implantation Technology - 96. Proceedings of the Eleventh International Conference on Ion Implantationp.721-4. 83. Lianwei-Wang; Chenglu-Lin; Qinwo-Shen; Rushan-Ni; Xiangdong-Chen; Shichang-Zou; Ostling-M, Growth mechanism of beta -FeSi/sub 2/ by reactive deposition epitaxy, Proceedings 1995 4th International Conference on Solid-State and Integrated Circuit Technology,p.230-2. 84. W-Ping-Xu; Lianwei-Wang; Huoping-Xin; Lirong-Zheng; Chenglu-Lin, Hydrothermal preparation of BaTiO/sub 3/ thin film on silicon, Proceedings of 1995 4th International Conference on Solid-State and Integrated Circuit Technology. p.278-80 85. L. Wang, A. Nichelatti, H. Schellevis, C. de Boer, C. Visser, T.N. Nguyen, P.M. Sarro; High Aspect Ratio through-Wafer Interconnections for 3D-Microsystems Proc. 16th IEEE International MEMS conference, January 19-23, 2003, Kyoto, Japan, pp. 634-637. 86.Y. Chen, L.W.Wang, andP.M. Lina, Highly controllable electrochemical deep etching process on silicon, IEEE MEMS 2005, Jan.30-Feb.3, Miami, USA, pp 512-515. 87.Yu Chen, Pingsheng Guo, Lianwei Wang,Influence of experimental environment on the process of photo-assisted electrochemical etching process on silicon, Proceeding of SPIE Vol. 5774, pp.573-576. TFPA2004, May 31-Jun.2 2004, Shanghai 88.X. Q. Bao, Y. F. Ding, Y. Chen, P. S. Guo, Y. L. Shi, L.W. Wang, Z. S. Lai, Transfer Bonding of Thick Silicon Nitride Film Via Split of Porous Silicon, Proceeding of SPIE Vol.5774, pp.577-580. TFPA2004, May 31-Jun.2 2004, Shanghai 89.Deyan Peng, Guodong Li, Lianwei Wang and Zongsheng Lai. Index-compatible design of multiplayer film for MEMS-type variable optical attenuator, Proceeding of SPIE Vol.5774, pp.603-606. TFPA2004, May 31-Jun.2 2004, Shanghai 90. Z. Wang, L. Wang, H. Schellevis, W. Wien, J.N. Burghartz, P.M. Sarro; Through-Wafer Electrical Vias for RF Silicon technology Proc. SAFE 2003, November 25-26, 2003, Veldhoven, the Netherlands, ISBN 90-73461-39-1, pp. 761-765. 91. L. Wang, C.C.G. Visser, C.R. de Boer, M. Laros, W. van der Vlist, J. Groeneweg, G. Craciun, P.M. Sarro; Wafer thinning for high-density, through-wafer interconnects Proc. of SPIE Vol. #4979 - Micromachining and Microfabrication Process Technology VIII, 27-29 January 2003, San Jose, CA, ISSN 0277-786X, pp. 532-539. 92. L. Wang, C.C.G. Visser, C. de Boer, M. Laros, W. van der Vlist, J. Groeneweg, G. Craciun, P.M. Sarro; Thinning of Micromachined Wafers for High-Density, Through-Wafer Interconnects Proc. SAFE 2002, November 27-28, 2002, Veldhoven, The Netherlands, Publ. STW, ISBN 90-73461-33-2, pp. 121-126. 93.Lianwei Wang and Pasqualina M. Sarro. “ Wafer thinning for highly dense 3D electronic structure”, Proceedings of SAFE 2001, 28-29 Nov. 2001, Veldhoven, The Netherlands, pp.214-219. ISBN 90-73461-29-4. 94. Zhejin Wang, Lianwei Wang, Yuxiang Zheng, Xiaoshuang Chen,, “Fabrication of IR Reflectors by Porous Silicon Technique”, IEEE ICSICT2006, Oct. 23-26, 2006,Shanghai, China, pp.1010-1012 95. Jinlong Li, Shaohui Xu, Xinping Qu, Guoping Ru, Zhengyin Yu, Weili Liu, Zhitang Song and Lianwei Wang, “A 3D pn junction structure for radiation energy conversion chip”, IEEE IJWT2006, pp123-6, May 2006, Shanghai. 96. Xiao Wang, Xiaoming Chen, Zhenyin Yu, Lianwei Wang, A Novel Fabrication Approach for Microneedles Using Silicon Micromaching Technology, Proc. IEEE-NEMS 2006 , pp. 547-550, The 1st IEEE-NEMS, January 18-21 2006, Zhuhai, China 97. Junxu Wu, Lianwei Wang, Xiaoming Chen, Mingjie Zheng, Weili Liu, Zhitang Song and P.M. Sarro, “Oxidation of Silicon Electrochemically Etched Microchannels Arrays”, Proc. of IEEE-NEMS 2006 , pp. 399-342, The 1st IEEE-NEMS, January 18-21 2006, Zhuhai, China 98. Liang Xu, Jinchuan You, Lianwei Wang,”Investigation of Nanostructure on silicon by electrochemical etching”Sixth International Conference on Thin Film Physics and Applications, edited by Wenzhong Shen, Junhao Chu, Proceedings of SPIE Vol. 6984, PSI69842Z, (2008) 99. Tingting Liu,Tao Liu,Jinlong Li,Xiaoming Chen,Xinglong Guo,Peisheng Xin,Shaohui Xu,and Lianwei Wang, “Fabrication and characterization of 3D pn junction structure for radiation detection”, Sixth International Conference on Thin Film Physics and Applications, edited by Wenzhong Shen,Junhao Chu, Proceedings of SPIE Vol.6984,69843M(Mar.11,2008) 100.Shuqin Ding, Xiaodong Zhang, Xiaoming Chen, Lianwei Wang, “A Beam Operated MEMS Variable Optical Attenuator”, Sixth International Conference on Thin Film Physics and Applications, edited by Wenzhong Shen, Junhao Chu, Proceedings of SPIE Vol. 6984, 69843N, (2008) 101.Lin Jilei, Xiaoming Chen, Shaohui Xu, Peisheng Xin and Lianwei Wang, “Investigation of the Formation of undercut during the Fabrication of Silicon Microchannel by Electrochemical Etching”, Proceedings of IEEE NEMS 2008, pp.84-87, The 3st IEEE-NEMS, January 6-9 2008, Sanya, China (EI)extended abstract to be published in IEEE NTC Review of Advanced in Micro, Nano, and Molecular Engineering. 102.Xiaoming Chen, Jilei Lin, Shaohui Xu, Peisheng Xin, and Lianwei Wang, “Oxidation of High Area Ratio Silicon Microchannels Fabricated by Electrochemical Etching”, Proceedings of IEEE-NEMS 2008 , pp. 78-81, The 3st IEEE-NEMS, January 6-9 2008,Sanya, China (EI), extended abstract to be published in IEEE NTC Review of Advanced in Micro, Nano, and Molecular Engineering. 103.Fengjuan Miao, Jie Zhang, Shaohui Xu, Lianwei Wang, Junhao Chu, Zhishen Cao, Peng Zhan and ZhenlinWang, Fabrication of a reflective mirror within wide incidence angles for mid-infrared wavelength, META08 - Proceedings of the 2008 International Workshop on Metamaterials p 173-176, 2008 104.Ding Yuan\ Pengliang Ci\ Fei Tian\ ling Shi\ Shaohui Xu\ Peisheng Xinl and Lianwei Wangl The Improvement of Electrochemical Etching Process for Silicon Microchannel Plates Proceedings of the 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems January 5-8, 2009, Shenzhen, China, p.964 105.Jing Shi, Jinchuan You , Lianwei Wang Paul K. 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